Since Heisei 9 there were at least 3 different Proof sets with all 6 coins (1¥ - 500¥) per year, so I added them together. I included the links for the circulation like types.
Sources: JDNA 2015 and KM-Catalog 2012
Showa - Y#72a, 73a, 74, 81, 82, 87
62 - 230.000 63 - 200.000
Heisei - Y#95.1, 96.1, 97.1, 98.1, 99.1, 101.1
1 - 200.000
Heisei - Y#95.2, 96.2, 97.2, 98.2, 99.2, 101.2
2 - 200.000 6 - 227.000 10 - 200.000
3 - 220.000 7 - 200.000 11 - 280.000
4 - 250.000 8 - 189.000
5 - 250.000 9 - 212.000
Heisei - Y#95.2, 96.2, 97.2, 98.2, 101.2, 125
12 - 226.000 17 - 258.000 22 - 130.187
13 - 238.000 18 - 247.000 23 - 108.000
14 - 242.000 19 - 201.800 24 - 103.000
15 - 275.000 20 - 168.200 25 - 102.000
16 - 283.000 21 - 132.000 26 - *67.000 maybe incomplete
Edit:
A big thank you to Ductax and KennyG
I hope you didn't get carpal tunnel syndrome while validating
